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Characterization in silicon processing /

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Strausser, Yale.

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Characterization in silicon processing /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Characterization in silicon processing // editor, Yale Strusser ; contributing editors, C.R. Brundle, Gary E. McGuire ; managing editor, Lee E. Fitzpatrick.
other author:	Strausser, Yale.
Published:	Boston :Butterworth-Heinemann ; : c1993.,
Description:	xiii, 240 p. :ill. ;25 cm.
Series:	Materials characterization series
Subject:	Electric conductors. -
ISBN:	0750691727

Characterization in silicon processing /
Characterization in silicon processing /editor, Yale Strusser ; contributing editors, C.R. Brundle, Gary E. McGuire ; managing editor, Lee E. Fitzpatrick. - Boston :Butterworth-Heinemann ;c1993. - xiii, 240 p. :ill. ;25 cm. - Materials characterization series.

Includes bibliographical references and index.

ISBN: 0750691727

LCCN: 93022784Subjects--Topical Terms:

669427
Electric conductors.

LC Class. No.: QC611.8.S5 / C48 1993

Dewey Class. No.: 620.1/93

Characterization in silicon processing /
LDR:00682nam a2200193 a 45 001 652352
003 DLC
005 19931119081043.0
008 930512s1993 maua b 001 0 eng
010 $a 93022784
020 $a 0750691727
035 $a dt 00012597
040 $a DLC $c DLC $d DLC
050 0 0 $a QC611.8.S5 $b C48 1993
082 0 0 $a 620.1/93 $2 20
245 0 0 $a Characterization in silicon processing / $c editor, Yale Strusser ; contributing editors, C.R. Brundle, Gary E. McGuire ; managing editor, Lee E. Fitzpatrick.
260 $a Boston : $a Greenwich : $c c1993. $b Butterworth-Heinemann ; $b Manning,
300 $a xiii, 240 p. : $b ill. ; $c 25 cm.
440 0 $a Materials characterization series
504 $a Includes bibliographical references and index.
650 $a Electric conductors. $3 669427
650 $a Semiconductor films. $3 669428
650 $a Silicon. $3 669429
650 $a Surface chemistry. $3 551428
700 $a Strausser, Yale. $3 669426

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W0024785

罕用書庫221室(美崙校區,調書請點預約)(RU_221)

01.外借(書)_YB

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QC611.8.S5 C469 1993

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