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Science and technology of microfabri...

Howard, R. E. (1948-)

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Science and technology of microfabrication : = symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Science and technology of microfabrication :/ editors, R.E. Howard ... [et al.].
Reminder of title:	symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. /
other author:	Howard, R. E.
Published:	Pittsburgh, Pa. :Materials Research Society, : c1987.,
Description:	xvii, 373 p. :ill. ;24 cm.
Notes:	Proceedings of the Symposium on the Science and Technology of Microfabrication, sponsored by the Materials Research Society as part of its 1986 Fall Meeting.
Series:	Materials Research Society symposia proceedings,
Subject:	Integrated circuits - Very large scale integration -
ISBN:	0931837421 :

Science and technology of microfabrication : = symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. /
Science and technology of microfabrication :symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. /editors, R.E. Howard ... [et al.]. - Pittsburgh, Pa. :Materials Research Society,c1987. - xvii, 373 p. :ill. ;24 cm. - Materials Research Society symposia proceedings,v. 760272-9172 ;.

Proceedings of the Symposium on the Science and Technology of Microfabrication, sponsored by the Materials Research Society as part of its 1986 Fall Meeting.

Includes bibliographies and indexes.

ISBN: 0931837421 :US24.25

LCCN: 87007749 //r97Subjects--Topical Terms:

703314
Integrated circuits
--Very large scale integration

LC Class. No.: TK7874 / .S33 1987

Dewey Class. No.: 621.381/73

Science and technology of microfabrication : = symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. /
LDR:00886cam a2200205 a 45 001 670538
003 DLC
005 19970130112309.3
008 870317s1987 paua b 101 0 eng
010 $a 87007749 //r97
020 $a 0931837421 : $c US24.25
035 $a me 87000240
040 $a DLC $c DLC $d DLC
050 0 0 $a TK7874 $b .S33 1987
082 0 0 $a 621.381/73 $2 19
245 0 0 $a Science and technology of microfabrication : $b symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. / $c editors, R.E. Howard ... [et al.].
260 $a Pittsburgh, Pa. : $c c1987. $b Materials Research Society,
300 $a xvii, 373 p. : $b ill. ; $c 24 cm.
440 0 $a Materials Research Society symposia proceedings, $x 0272-9172 ; $v v. 76
500 $a Proceedings of the Symposium on the Science and Technology of Microfabrication, sponsored by the Materials Research Society as part of its 1986 Fall Meeting.
504 $a Includes bibliographies and indexes.
650 $a Integrated circuits $x Very large scale integration $x Design and construction $x Congresses. $3 703314
650 $a Microfabrication $x Congresses. $3 703315
700 $a Howard, R. E. $q (Richard Edwin), $d 1948- $3 703312
710 $a Materials Research Society. $b Meeting $d (1986 : $c Boston, Mass.) $3 703313
711 $a Symposium on the Science and Technology of Microfabrication $d (1986 : $c Boston, Mass.) $3 703316