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Chemical-mechanical polishing--funda...

Babu, S. V.

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Chemical-mechanical polishing--fundamentals and challenges : = symposium held April 5-7, 1999, San Francisco, California, U.S.A. /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Chemical-mechanical polishing--fundamentals and challenges :/ editors, S.V. Babu ... [et al.].
Reminder of title:	symposium held April 5-7, 1999, San Francisco, California, U.S.A. /
remainder title:	Chemical-mechanical polishing
other author:	Babu, S. V.
Published:	Warrendale, Pa. :Materials Research Society, : c2000.,
Description:	ix, 281 p. :ill. ;24 cm.
Subject:	Electrolytic polishing - Congresses. -
ISBN:	1558994734 :
ISSN:	0272-9172

Chemical-mechanical polishing--fundamentals and challenges : = symposium held April 5-7, 1999, San Francisco, California, U.S.A. /
Chemical-mechanical polishing--fundamentals and challenges :symposium held April 5-7, 1999, San Francisco, California, U.S.A. /Chemical-mechanical polishingeditors, S.V. Babu ... [et al.]. - Warrendale, Pa. :Materials Research Society,c2000. - ix, 281 p. :ill. ;24 cm. - Materials Research Society symposium proceedings ;v. 566. - Materials Research Society symposia proceedings ;v. 566..

Includes bibliographical references and indexes.

ISBN: 1558994734 :US77.00

ISSN: 0272-9172

LCCN: 99058801Subjects--Topical Terms:

718719
Electrolytic polishing
--Congresses.

LC Class. No.: TS654.5 / C48 2000

Dewey Class. No.: 621.3815/2

Chemical-mechanical polishing--fundamentals and challenges : = symposium held April 5-7, 1999, San Francisco, California, U.S.A. /
LDR:00816pam a2200229 a 45 001 679262
003 DLC
005 20001027201412.6
008 001026s2000 paua b 101 0 eng
010 $a 99058801
020 $a 1558994734 : $c US77.00
022 $a 0272-9172
035 $a me 00890071
040 $a DLC $c DLC $d DLC $d DH
042 $a pcc
050 0 0 $a TS654.5 $b C48 2000
082 0 0 $a 621.3815/2 $2 21
245 0 0 $a Chemical-mechanical polishing--fundamentals and challenges : $b symposium held April 5-7, 1999, San Francisco, California, U.S.A. / $c editors, S.V. Babu ... [et al.].
246 3 0 $a Chemical-mechanical polishing
260 $a Warrendale, Pa. : $c c2000. $b Materials Research Society,
300 $a ix, 281 p. : $b ill. ; $c 24 cm.
490 1 $a Materials Research Society symposium proceedings ; $v v. 566
504 $a Includes bibliographical references and indexes.
650 $a Electrolytic polishing $x Congresses. $3 718719
650 $a Grinding and polishing $x Congresses. $3 718720
700 $a Babu, S. V. $3 718715
700 $a Danyluk, S. $3 718716
700 $a Krishnan, M. $3 718717
700 $a Tsujimura, M. $3 718718
830 $a Materials Research Society symposia proceedings ; $v v. 566. $3 718721