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Chemical-mechanical polishing--funda...

Babu, S. V.

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Chemical-mechanical polishing--fundamentals and challenges : = symposium held April 5-7, 1999, San Francisco, California, U.S.A. /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Chemical-mechanical polishing--fundamentals and challenges :/ editors, S.V. Babu ... [et al.].
其他題名:	symposium held April 5-7, 1999, San Francisco, California, U.S.A. /
其他題名:	Chemical-mechanical polishing
其他作者:	Babu, S. V.
出版者:	Warrendale, Pa. :Materials Research Society, : c2000.,
面頁冊數:	ix, 281 p. :ill. ;24 cm.
標題:	Electrolytic polishing - Congresses. -
ISBN:	1558994734 :
ISSN:	0272-9172

Chemical-mechanical polishing--fundamentals and challenges : = symposium held April 5-7, 1999, San Francisco, California, U.S.A. /
Chemical-mechanical polishing--fundamentals and challenges :symposium held April 5-7, 1999, San Francisco, California, U.S.A. /Chemical-mechanical polishingeditors, S.V. Babu ... [et al.]. - Warrendale, Pa. :Materials Research Society,c2000. - ix, 281 p. :ill. ;24 cm. - Materials Research Society symposium proceedings ;v. 566. - Materials Research Society symposia proceedings ;v. 566..

Includes bibliographical references and indexes.

ISBN: 1558994734 :US77.00

ISSN: 0272-9172

LCCN: 99058801Subjects--Topical Terms:

718719
Electrolytic polishing
--Congresses.

LC Class. No.: TS654.5 / C48 2000

Dewey Class. No.: 621.3815/2

Chemical-mechanical polishing--fundamentals and challenges : = symposium held April 5-7, 1999, San Francisco, California, U.S.A. /
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245 0 0 $a Chemical-mechanical polishing--fundamentals and challenges : $b symposium held April 5-7, 1999, San Francisco, California, U.S.A. / $c editors, S.V. Babu ... [et al.].
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490 1 $a Materials Research Society symposium proceedings ; $v v. 566
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650 $a Grinding and polishing $x Congresses. $3 718720
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700 $a Danyluk, S. $3 718716
700 $a Krishnan, M. $3 718717
700 $a Tsujimura, M. $3 718718
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